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KMID : 1102020210510010008
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Applied Microscopy
2021 Volume.51 No. 1 p.8 ~ p.8
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TEM sample preparation using micro-manipulator for in-situ MEMS experiment
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Lee Hyun-Jong
Okello Odongo Francis Ngome
Kim Gi-Yeop
Song Kyung
Choi Si-Young
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Abstract
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Growing demands for comprehending complicated nano-scale phenomena in atomic resolution has attracted in-situ transmission electron microscopy (TEM) techniques for understanding their dynamics. However, simple to safe TEM sample preparation for in-situ observation has been limited. Here, we suggested the optical microscopy based micro-manipulating system for transferring TEM samples. By adopting our manipulator system, several types of samples from nano-wires to plate-like thin samples were transferred on micro-electro mechanical systems (MEMS) chip in a single step. Furthermore, the control of electrostatic force between the sample and the probe tip is found to be a key role in transferring process.
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KEYWORD
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Manipulator, MEMS, In-situ transmission electron microscopy
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